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production productivity

华新HI-TECH致力於生產值得信賴和品質一流的產品。

SPIN HEAD CHUCK

開發並生產運用在以Silicon Wafer的Etching, Cleaning Rinse, Drying為目的的精密清潔設備上的,固定晶片的spin head chuck。

為了進行表面及內面處理而靈活運用在300mm,200mm等多種工藝中。主要客戶公司大部分都安置於Cleaning設備,根據客戶公司的主要化學用品及工藝,我們擁有十多種Spin Head Chuck產品。(PVC,PTFE,PEEK等多種材料),根據使用的設備,可為顧客設計新的Chuck及材料。

POROUS CHUCK

生產及開發以Grinding, Dicing Saw為目的的設備上,固定Wafer用的Porous Chuck。

通過加工多種Porous Ceramic,大量生產Vacuum chuck,還運用與醫療設備及Pick up Tool等。可測量加工率及尺寸,根據設備的不同,可進行新的Chuck設置及材料開發。

MICRO NOZZLE

生產及開發300mm Silicon Wafer, 用於以Etching, Cleaning, Rinse, Drying為目的的精密清潔(Cleaning)設備上的Micro Nozzle。

針對半導體生產工藝中產生的多種雜質(尤其是Si Dust摻雜),靈活運用細微滴液去除雜質的新技術。主要安裝於20分之一以下的Cleaning設備,根據設備及使用目的,具有10多種噴嘴。根據使用設備的不同,可為客戶公司進行設置及開發Nozzle產品。






Bio/Optical Components

HSHI-Tech is one of several companies offering glass quartz, and sapphire machining and bonding technologies. We satisfy the high-end, high-quality optical measurement requirements of our customers in the biomedical and chemical industries. Our company has grown to be a leading manufacturer of superior-quality cost-effective precision optical components. Generally, the manufacturing of optical components involves micro-machining, optical polishing, and diffusion bonding in a high-temperature furnace, with cl eaning processes performed between each step. Our core technology is to polish the surface of optical materials to a flatness within 100 nm, and then bond these materials by atomic diffusion. Without the use of adhesive bonding, our optical products are strongly resistant to heat and chemicals, while also having superior optical surface quality.

The micro-machining process is a technology in which HSHI-Tech has particular expertise. A microchannel with width and depth of a few hundred micrometers is achieved using a mechanical micro-milling tool. Furthermore, a micro-hole with a diameter of a few hundred micrometers is manufactured using a specific mechanical micro-drilling technique. Micro-holes smaller than 50 mm can be machined using a laser-drilling technique and a nanosecond laser source, as shown in Fig. 1(a). HSHI-Tech developed a laser-drilling technique for drilling holes with an aspect ratio as high as 20:1, as shown in Fig. 1(b). When quartz and sapphire are being machined, chips and particles are generated in massive quantities. The machining process is similar to that of mechanical wear, whereby micro-diamond particles coating the surface of the drilling and milling bits forcibly hit the surface of work pieces. Thus, maintaining high cleanness is crucial to avoid contamination by particles adhered to material surfaces, which would degrade the optical quality of our products. After long-term experimentation we established a differentiated cleaning process using alkali chemicals such as SC1 and KOH that effectively remove contaminated particles that may be adhered to micro-channels and micro-holes.

In our factory, we employ a seamless system for producing optical and bio parts, as illustrated in Fig. 2. The production line consists of quartz and ceramics machining equipment, a laser drilling and milling machine an optical polisher with a precise polishing pad, and a high-temperature furnace. The surface flatness and roughness of polished quartz and sapphire are measured with a laser interferometer, as shown in Fig. 3.

Bio/Optical Components

與光學相結合的藍寶石cell能夠抵抗強酸強鹼環境。

一般情況下,機器/熱性質相異,使用単結晶藍寶石生產立体构造是較為困難的。単結晶藍寶石的板片與光學相符合,所以能夠生產多種產品。將結晶方向相異的板片重新排列後在2400℃以下加工,令其相接。這時若無法將溫度控制在最低,將導致結晶方向不一致,損壞產品。我公司數年間,通過大量實驗,獲得能夠控制溫度的工藝技術,左側圖片展示的是良好比例下多種形態的藍寶石cell。

Cuvette

在光譜儀內使用的較小液體容器叫做CUVETTE(小試管)。分光光度計測定透射比或是反射率,並分析在試管內的液體的化學試驗系統。

試管的材料不應妨礙光子的移動,由透射比較高的光學材料製成。試管表面通過光學打磨後,提高透射率的同時,降低反射率。為了降低表面的反射率,還應利用防止反射的材料進行鍍膜。华新HI-TECH能夠生產高透射率產品,抵擋用與光學打磨及連接時使用的可視光線,近紫外線波長。

Polarizing Beam Splitter (PBS)

PBS是使用與半導體及光子學裝置等光學系統,分離光線,製造偏光的部件。

P型光通過PBS材料,S型光從PBS接觸面反射並分離。偏光的品質決定於材料的透射率及表面照度,兩個棱鏡的接觸面特性最能夠影響偏光的品質。华新HI-TECH利用高品質的表面打磨及清潔技術,為您提供優質的接觸面。

Flow CELL

流動細胞主要用於測試流動細胞系統。左側照片展示的是典型的流動細胞的形態。

附著熒光物質的生物細胞與離子水共同通過流動細胞路徑,流動細胞測定系統能夠通過反射回來的激光測定細胞的大小和個數。光學流動細胞適用於激光血球測定儀及粒子測定儀等分析系統。华新HI-TECH的產品不使用粘合劑,是通過光學方式製造的儀器,具有耐熱,抗化學性。

Lab on a chip (LOC)

LOC適用與DNA電氣泳動,微量試樣檢測及醫療診斷。

一般情況下,根據微型加工及微型電子器械系統(MEMS)技術,微型通道由上極板及下極板相接製成。現在市場中存在的是如左上圖所示的主要由玻璃和PMMA材料製成。

玻璃LOC歷來是利用MEMS工藝,在強酸下雕刻玻璃晶片。玻璃的雕刻強度(10MPa)僅為石英(100MPa)的1/10,能夠承受的液體壓力較低,流量僅為每分鐘數十微升。PMMA材料雖然是為了固定微型壓模,但耐熱性較差,使用上有一定的限制。相反,石英LOC能夠承受數MPa的高壓,每分鐘達到數cc的流量。华新HI-TECH能夠生產如左下图展示的石英材料的LOC。微型上極板及下極板通過光學打磨技術,熱擴散強度與粒狀材料一致。华新HI-TECH生產的LOC每分鐘能夠達到數cc的流量,根據顧客的要求可開發新型解決方案。