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SPIN HEAD CHUCK

We have developed and manufactured Porous chuck which fix a wafer, to grind and dicing saw a silicon wafer at equipment. We have produced the vacuum chuck through various porous ceramic processing. It is utilized as medical equipment, pick up tool and so on. (It is possible to customize and to regulate porosity and size) It is possible to develop the new designed chucks and materials according to customers and machines.

POROUS CHUCK

We have developed and manufactured Spin head chuck which fix a wafer, to etch, clean, rinse and dry a silicon wafer at cleaning equipment.. It is used to treat the surface and both sides on process of 300mm and 200mm. Our main clients install the Spin head chuck at the cleaning equipment and we have various kind of Spin head chuck depends on chemical and process using several materials such as PVC, PTFE, PEEK and etc. It is possible to develop the new designed chucks and materials according to customers and machines.

MICRO NOZZLE

We have developed and manufactured Porous chuck which fix a wafer, to grind and dicing saw a silicon wafer at equipment. We have produced the vacuum chuck through various porous ceramic processing. It is utilized as medical equipment, pick up tool and so on. (It is possible to customize and to regulate porosity and size) It is possible to develop the new designed chucks and materials according to customers and machines.






Bio/Optical Components

HSHI-Tech is one of several companies offering glass quartz, and sapphire machining and bonding technologies. We satisfy the high-end, high-quality optical measurement requirements of our customers in the biomedical and chemical industries. Our company has grown to be a leading manufacturer of superior-quality cost-effective precision optical components. Generally, the manufacturing of optical components involves micro-machining, optical polishing, and diffusion bonding in a high-temperature furnace, with cl eaning processes performed between each step. Our core technology is to polish the surface of optical materials to a flatness within 100 nm, and then bond these materials by atomic diffusion. Without the use of adhesive bonding, our optical products are strongly resistant to heat and chemicals, while also having superior optical surface quality.

The micro-machining process is a technology in which HSHI-Tech has particular expertise. A microchannel with width and depth of a few hundred micrometers is achieved using a mechanical micro-milling tool. Furthermore, a micro-hole with a diameter of a few hundred micrometers is manufactured using a specific mechanical micro-drilling technique. Micro-holes smaller than 50 mm can be machined using a laser-drilling technique and a nanosecond laser source, as shown in Fig. 1(a). HSHI-Tech developed a  laser-drilling technique for drilling holes with an aspect ratio as high as 20:1, as shown in Fig. 1(b). When quartz and sapphire are being machined, chips and particles are generated in massive quantities. The machining process is similar to that of mechanical wear, whereby micro-diamond particles coating the surface of the drilling and milling bits forcibly hit the surface of work pieces. Thus, maintaining high cleanness is crucial to avoid contamination by particles adhered to material surfaces, which would degrade the optical quality of our products. After long-term experimentation we established a differentiated cleaning process using alkali chemicals such as SC1 and KOH that effectively remove contaminated particles that may be adhered to micro-channels and micro-holes.

In our factory, we employ a seamless system for producing optical and bio parts, as illustrated in Fig. 2. The production line consists of quartz and ceramics machining equipment, a laser drilling and milling machine an optical polisher with a precise polishing pad, and a high-temperature furnace. The surface flatness and roughness of polished quartz and sapphire are measured with a laser interferometer, as shown in Fig. 3.

Bio/Optical Components

Optically bonded sapphire cells resist fluorinated acid and are not affected by strong alkalis. Generally, it is difficult to fabricate a three-dimensional structure using a single-crystal sapphire (corundum) because of its anisotropic (directionally dependent) mechanical and thermal properties. We produce the single-crystal sapphire structure by optically bonding small plates of sapphire to each other. First, small plates with different property directions are aligned such that they make slight contact with each other. Then, they are thermally bonded in a furnace below a melting temperature of 2500°C In this situation, if the temperature profile is not optimally controlled, the structure will fail to form because of the material’s anisotropy. After several years of experience and the accumulation of experimental data, we have developed the expertise to precisely control the temperature profile. As a result, we can consistently produce good yields of sapphire cell structures with various geometries, as shown in Fig. 4.

Cuvette

The small liquid containers used in a spectrophotometer are called cuvettes as shown in Fig. 5. The spectrophotometer is a chemical experimentation system that analyzes the ingredients of liquids contained in a cuvette by measuring their transmittance or reflectance. The cuvette is made from quartz with high transmittance so that it does not obscure the movement of the observed photons. The cuvette surface is optically polished, and to strengthen the transmittance and weaken the reflectance of the cuvette, the quartz surface may be coated with an anti-reflection material. Our company provides customers with reliable cuvettes that have high transmittance for visible light, near-ul traviolet, and near-infrared wavelengths, for use in optical polishing and bonding.

Polarizing Beam Splitter (PBS)

PBS is utilized in the optical system of the semiconductor and photonics equipment as shown in Fig. 6. It separates depolarized light into twin polarized beams. The S-pol arized light is reflected from the contact surface of the PBS, while the P-polarized light is transmitted through the PBS material. The quality of the polarizing beam mainly depends on the transmittance and surface roughness of the material. Most of all, the bonding surface characteristics of the two prisms have the dominant effect on the light quality. We ensure the quality of the bonded surface with our excellent surface polishing and cleaning techniques.

Flow CELL

The flow cell is used primarily in the cytometry measurement system, and Fig. 7 shows its typical geometry. The phosphor-colored bio-cell flows down into the narrow path of the flow cell in the cytometry system. The system detects bio-cells in deionized water upon receiving the laser light reflected from them. Optically bonded flow cells are the ideal optical component for flow cytometry, as well as other analytical systems such as laser beam blood cell counters and particle counters. HSHI-Tech flow cells are made from synthetic quartz and sapphire, using no adhesives; therefore, the flow cells are chemical and heat resistant

Lab on a chip (LOC)

LOC is utilized in DNA electrophoresis, trace sample detection, and medical diagnostics. It  is manufactured by bonding upper and lower plates  with a micro-channel that has been grooved and drilled by micromachining and microelectromechanical systems (MEMS) technology. At present, most LOCs on the market are made from glass and a polymethyl methacrylate polymer, as shown in Fig. 8.

The glass-type LOC is manufactured by etching a glass wafer with hydrofluoric (HF) acid using a conventional MEMS process. This LOC has a weakness in that the tensile strength of glass (10 MPa) is very low compared with that of quartz (100 MPa). Thus, because of the low pump pressure required, the flow rate of glass-type LOCs is only about a few dozen microliters per minute. Polymer-based LOCs are made using a micro-molding process but are characterized by thermal weakness which limits their use. Quartz-type LOCs, however, have sufficient resistance against pump pressures as high as a few mega pascals, and liquid can flow into the micro-channel at a few cubic centimeters per minute. The LOCs at HSHI-Tech are made from quartz, and have a strength of 100 MPa. Fig. 9 shows the typical HSHI-Tech L OC, wherein the upper and lower plates are bonded by thermal diffusion using no adhesive to achieve a bond surface strength similar to that of the bulk material. Channel flows with a large volume and high flow rate of a few cubic centimeters per minute can be achieved making our products suitable for mass production. We offer cost-effective and high-quality LOCs in customized designs.